Invention Grant
- Patent Title: Plasma treatment apparatus and plasma treatment method
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Application No.: US13688633Application Date: 2012-11-29
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Publication No.: US09885115B2Publication Date: 2018-02-06
- Inventor: Tomohiro Okumura
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: Panasonic IP Management
- Priority: JP2011-267962 20111207
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/326 ; C23C16/505 ; H01J37/32 ; B44C1/22 ; C23C16/513 ; H05H1/30

Abstract:
A plasma treatment apparatus that includes a chamber having an opening portion which serves as a plasma ejection port surrounded by a dielectric member; a gas supply pipe that introduces gas into an inside of the chamber; a solenoid coil disposed in a vicinity of the chamber; a high-frequency power supply having a pulse modulation function which is connected to the solenoid coil; and a base material mounting table disposed on a plasma ejection port side. Plasma can be stably generated using the plasma treatment apparatus.
Public/Granted literature
- US20130146564A1 PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD Public/Granted day:2013-06-13
Information query
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