Invention Grant
- Patent Title: Angular velocity sensor
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Application No.: US14484841Application Date: 2014-09-12
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Publication No.: US09885576B2Publication Date: 2018-02-06
- Inventor: Junichi Honda
- Applicant: Sony Corporation
- Applicant Address: JP Kanagawa
- Assignee: Sony Semiconductor Solutions Corporation
- Current Assignee: Sony Semiconductor Solutions Corporation
- Current Assignee Address: JP Kanagawa
- Agency: K&L Gates LLP
- Priority: JP2011-040509 20110225
- Main IPC: G01C19/574
- IPC: G01C19/574 ; G01C19/5747

Abstract:
An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.
Public/Granted literature
- US20140373629A1 ANGULAR VELOCITY SENSOR Public/Granted day:2014-12-25
Information query
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