Invention Grant
- Patent Title: Micromechanical sensor system and corresponding manufacturing method
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Application No.: US14472167Application Date: 2014-08-28
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Publication No.: US09885626B2Publication Date: 2018-02-06
- Inventor: Frieder Haag , Hubert Benzel
- Applicant: Timo Benzel , Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013217349 20130830
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00 ; B81B7/02 ; B81C1/00 ; B81B7/00 ; G01L19/14

Abstract:
A micromechanical sensor system includes a micromechanical sensor chip surrounded at least laterally by a molded housing which has a front side and a rear side. The micromechanical sensor chip includes a chip area on the rear side, which is omitted from the molded housing, and a rewiring device formed on the rear side, which, starting from the chip area, extends to the surrounding molded housing on the rear side, and from there, past at least one via from the rear side to the front side of the molded housing.
Public/Granted literature
- US20150059485A1 MICROMECHANICAL SENSOR SYSTEM AND CORRESPONDING MANUFACTURING METHOD Public/Granted day:2015-03-05
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