Invention Grant
- Patent Title: Particle detecting apparatus
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Application No.: US15064713Application Date: 2016-03-09
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Publication No.: US09885648B2Publication Date: 2018-02-06
- Inventor: Masaki Hirano , Yuichi Kuroda , Kenichi Otsuka
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2015-181204 20150914
- Main IPC: G01N15/06
- IPC: G01N15/06 ; G01N15/00

Abstract:
A particle detecting apparatus has a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion, a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit, a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known, and a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has a predetermined value.
Public/Granted literature
- US20170074792A1 PARTICLE DETECTING APPARATUS Public/Granted day:2017-03-16
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