Invention Grant
- Patent Title: Particle measuring apparatus and particle measuring method
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Application No.: US15066596Application Date: 2016-03-10
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Publication No.: US09885649B2Publication Date: 2018-02-06
- Inventor: Yuichi Kuroda , Masaki Hirano , Kenichi Otsuka
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2015-180055 20150911
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N15/14 ; G01N1/22

Abstract:
A particle measuring apparatus according to an embodiment includes a first supply part that introduces first gas. A second supply part introduces second gas having been filtered. A light source irradiates mixture gas including the first gas and the second gas with light. A light detector detects reflected light from the mixture gas and measures number of particles contained in the mixture gas. A pump sucks the mixture gas.
Public/Granted literature
- US20170074774A1 PARTICLE MEASURING APPARATUS AND PARTICLE MEASURING METHOD Public/Granted day:2017-03-16
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