Invention Grant
- Patent Title: Standing wave interferometric microscope
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Application No.: US15246512Application Date: 2016-08-24
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Publication No.: US09885660B2Publication Date: 2018-02-06
- Inventor: Rainer Daum , Xaver Voegele
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, Inc.
- Agent Michael O. Scheinberg
- Priority: EP15190749 20151021
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G02B21/16 ; G02B21/06 ; G02B21/18 ; G02B21/08 ; G02B21/36 ; G01N21/45

Abstract:
A wide-field interferometric microscope comprising: A specimen holder, for holding a specimen at an analysis location; An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; A detector arrangement, for examining output light from said combining element, wherein: The illuminator is configured to produce a standing wave of input radiation at the analysis location The detector arrangement comprises exactly two interferometric detection branches.
Public/Granted literature
- US20170115224A1 STANDING WAVE INTERFEROMETRIC MICROSCOPE Public/Granted day:2017-04-27
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