Invention Grant
- Patent Title: Apparatus and method for annular optical power management
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Application No.: US14250373Application Date: 2014-04-10
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Publication No.: US09885878B2Publication Date: 2018-02-06
- Inventor: Keith Serrels
- Applicant: DCG Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: FEI EFA, Inc.
- Current Assignee: FEI EFA, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Klarquist Sparkman, LLP
- Main IPC: G02B27/58
- IPC: G02B27/58 ; G02B21/32 ; G02B21/00

Abstract:
A system and method for obtaining super-resolution image of an object. An illumination beam is directed through an optical axis onto the object to be imaged. Paraxial rays of the illumination beam are deflected away from the optical axis and into a beam dump. The non-paraxial rays are collected after being reflected by the object so as to generate an image only from the non-paraxial rays.
Public/Granted literature
- US20140307311A1 APPARATUS AND METHOD FOR ANNULAR OPTICAL POWER MANAGEMENT Public/Granted day:2014-10-16
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