Invention Grant
- Patent Title: TFT array substrate and manufacturing method thereof
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Application No.: US15114848Application Date: 2016-05-17
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Publication No.: US09885933B1Publication Date: 2018-02-06
- Inventor: Anshi Li
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan, Hubei
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Wuhan, Hubei
- Agent Leong C. Lei
- Priority: CN201610060834 20160128
- International Application: PCT/CN2016/082413 WO 20160517
- International Announcement: WO2017/128561 WO 20170803
- Main IPC: H01L27/14
- IPC: H01L27/14 ; G02F1/1368 ; G02F1/1362 ; G02F1/1333 ; G02F1/1343 ; H01L29/45 ; H01L29/417

Abstract:
The present invention provides a TFT array substrate and a manufacturing method thereof. The TFT array substrate has a source electrode (801) and a drain electrode (802), which each include, stacked from bottom to top, a first molybdenum layer (811), a first aluminum layer (812), a second aluminum layer (813), and a second molybdenum layer (814). The first aluminum layer (812) and the second aluminum layer (813) each have a surface including a plurality of spikes (8120) formed and distributed thereon. The spikes (8120) of the second aluminum layer (813) have a height greater than a height of the spikes (8120) of the first aluminum layer (812) such that the source electrode (801) and the drain electrode (802) each have an upper surface exhibiting a rough surface having irregularity comprising raised and recessed portion. Compared to a flat smooth surface that is involved in the prior art, the rough surface having irregularity comprising raised and recessed portions helps expand contact area between the drain electrode (802) and the pixel electrode (1200) so as to reduce contact impedance between a TFT and the pixel electrode and improve performance of a liquid crystal display panel.
Public/Granted literature
- US20180039116A1 TFT ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-02-08
Information query
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