Invention Grant
- Patent Title: Substrate storing container
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Application No.: US15124512Application Date: 2014-03-26
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Publication No.: US09887116B2Publication Date: 2018-02-06
- Inventor: Kazunori Ozawa , Kazuya Inoue , Minoru Tomita
- Applicant: MIRAIAL Co., Ltd
- Applicant Address: JP Tokyo
- Assignee: MIRAIAL CO., LTD.
- Current Assignee: MIRAIAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- International Application: PCT/JP2014/058621 WO 20140326
- International Announcement: WO2015/145629 WO 20151001
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
The tip face 411 of the base portion 41 inserted into the retaining groove 321 and the groove bottom face 322 have a positional relationship of facing each other, and a bottom portion space 413 is formed between the base portion 41 inserted into the retaining groove 321 and the groove bottom face 322. A pair of side faces 412 of the base portion 41 inserted into the retaining groove 321 and the pair of groove side faces 323 have a positional relationship of facing each other, and side face spaces 324 which are in communication with an opening of the retaining groove 321 are respectively formed between the pair of side faces 412 of the base portion 41 inserted into the retaining groove and the pair of groove side faces 323, and the bottom portion space is in communication with the side face space.
Public/Granted literature
- US20170025294A1 SUBSTRATE STORING CONTAINER Public/Granted day:2017-01-26
Information query
IPC分类: