Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US13629037Application Date: 2012-09-27
-
Publication No.: US09887138B2Publication Date: 2018-02-06
- Inventor: Takayuki Yamada , Hideyuki Arai
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-118035 20100524
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/66 ; H01L21/8238 ; H01L27/02 ; H01L21/66

Abstract:
A semiconductor device includes first and second MIS transistors and a dummy element. The first MIS transistor includes a first gate insulating film which includes a first high-k insulating film formed on a first active region and contains an adjusting metal. The second MIS transistor includes a second gate insulating film which includes a second high-k insulating film formed on a second active region and is free of the adjusting metal. The dummy element includes a dummy gate insulating film which includes a dummy high-k insulating film formed on a dummy active region and at least a portion of which is free of the adjusting metal. The first active region is formed in a second conductivity type first well region. The second active region is formed in a first conductivity type second well region. The dummy active region is formed in a second conductivity type third well region.
Public/Granted literature
- US20130020654A1 SEMICONDUCTOR DEVICE Public/Granted day:2013-01-24
Information query
IPC分类: