Invention Grant
- Patent Title: Backside device contact
-
Application No.: US15234913Application Date: 2016-08-11
-
Publication No.: US09887156B2Publication Date: 2018-02-06
- Inventor: Jeffrey P. Gambino , Mark D. Jaffe , Steven M. Shank , Anthony K. Stamper
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Sherman IP LLP
- Agent Kenneth L. Sherman; Steven Laut
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L23/528 ; H01L21/768 ; H01L21/762 ; H01L21/683 ; H01L23/522 ; H01L27/12 ; H01L29/06 ; H01L23/485

Abstract:
A back-side device structure with a silicon-on-insulator substrate that includes a device layer, a buried insulator layer, a trench that extends through the device layer and that partially extends through the buried insulator layer, at least one dielectric layer that is formed on the device layer and includes a first opening that communicates with the trench and a contact plug that fills the trench. A final substrate is connected to the buried insulator layer such that the contact plug contacts metallization of the final substrate. The contact plug is externally connected with a source to provide signals to the back-side device structure through a wire formed in the at least one dielectric layer.
Public/Granted literature
- US20160372416A1 BACKSIDE DEVICE CONTACT Public/Granted day:2016-12-22
Information query
IPC分类: