A package structure includes a carrier defining a cavity in which a die is disposed. A dielectric material fills the cavity around the die. A first conductive layer is disposed over a first surface of the carrier. A first dielectric layer is disposed over an active surface of the die, the first conductive layer and the first surface of the carrier. A first conductive pattern is disposed over the first dielectric layer, and is electrically connected to the first conductive layer and to the active surface of the die. A second dielectric layer is disposed over the second surface of the carrier and defines a hole having a wall aligned with a sidewall of the cavity. A second conductive layer is disposed over the second dielectric layer. A third conductive layer is disposed on the sidewall of the cavity and the wall of the second dielectric layer.