Invention Grant
- Patent Title: Semiconductor device manufacturing method, semiconductor device, and wire bonding apparatus
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Application No.: US15239849Application Date: 2016-08-18
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Publication No.: US09887174B2Publication Date: 2018-02-06
- Inventor: Naoki Sekine
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP2014-032217 20140221
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A semiconductor device manufacturing method includes: raising and moving a bonding tool, while paying out a wire, in a direction from a second toward a first bonding point to form in the wire a cut portion bent in a vicinity of the second bonding point; lowering and moving a tip of the bonding tool to the cut portion; lowering the bonding tool vertically to thin the cut portion; raising the bonding tool while paying out the wire; and moving the bonding tool in a direction away from the first and second bonding points and along a wire direction connecting the first and second bonding points and then cutting the wire at the cut portion to form a wire tail. This allows the length of the wire tail to be adjusted easily and efficiently to be constant.
Public/Granted literature
- US20160358880A1 SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, AND WIRE BONDING APPARATUS Public/Granted day:2016-12-08
Information query
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