• Patent Title: Semiconductor device manufacturing method, semiconductor device, and wire bonding apparatus
  • Application No.: US15239849
    Application Date: 2016-08-18
  • Publication No.: US09887174B2
    Publication Date: 2018-02-06
  • Inventor: Naoki Sekine
  • Applicant: SHINKAWA LTD.
  • Applicant Address: JP Tokyo
  • Assignee: SHINKAWA LTD.
  • Current Assignee: SHINKAWA LTD.
  • Current Assignee Address: JP Tokyo
  • Agency: JCIPRNET
  • Priority: JP2014-032217 20140221
  • Main IPC: H01L23/00
  • IPC: H01L23/00
Semiconductor device manufacturing method, semiconductor device, and wire bonding apparatus
Abstract:
A semiconductor device manufacturing method includes: raising and moving a bonding tool, while paying out a wire, in a direction from a second toward a first bonding point to form in the wire a cut portion bent in a vicinity of the second bonding point; lowering and moving a tip of the bonding tool to the cut portion; lowering the bonding tool vertically to thin the cut portion; raising the bonding tool while paying out the wire; and moving the bonding tool in a direction away from the first and second bonding points and along a wire direction connecting the first and second bonding points and then cutting the wire at the cut portion to form a wire tail. This allows the length of the wire tail to be adjusted easily and efficiently to be constant.
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