Invention Grant
- Patent Title: Structure containing first and second vertically stacked nanosheets having different crystallographic orientations
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Application No.: US15257073Application Date: 2016-09-06
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Publication No.: US09887197B2Publication Date: 2018-02-06
- Inventor: Karthik Balakrishnan , Kangguo Cheng , Pouya Hashemi , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/06 ; H01L29/04 ; H01L21/8238

Abstract:
A semiconductor structure is provided that includes a substrate comprising a first semiconductor material having a first crystallographic orientation and a first device region and a second device region. First vertically stacked and suspended nanosheets of semiconductor channel material of the first crystallographic orientation are located above the substrate and within the first device region. Second vertically stacked and suspended nanosheets of semiconductor channel material of a second crystallographic orientation are located above the substrate and within the second device region. In accordance with the present application, the second crystallographic orientation is different from the first crystallographic orientation.
Public/Granted literature
- US20170179128A1 NANOSHEET CMOS WITH HYBRID ORIENTATION Public/Granted day:2017-06-22
Information query
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