Invention Grant
- Patent Title: Ferroelectric mechanical memory and method
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Application No.: US15200816Application Date: 2016-07-01
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Publication No.: US09887205B2Publication Date: 2018-02-06
- Inventor: Glen R Fox , Jeffrey S. Pulskamp , Ronald G. Polcawich
- Applicant: U.S. Army Research Laboratory
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee Address: US DC Washington
- Agent Lawrence E. Anderson
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11507 ; H01L43/08 ; H01L43/02 ; H01L43/10 ; H01L43/12 ; G11C11/22 ; G11C11/50 ; G11C23/00

Abstract:
A method of making a memory device comprising a base; a capacitor comprising a ferroelectric layer and at least two electrically conductive layers, the ferroelectric layer being located between the at least two electrically conductive layers; each of the at least two conductive layers being operatively connected to a current source; a cantilever attached to the base at first end and movable at a second end, the ferroelectric capacitor being mounted to the cantilever such that the second end of the cantilever moves a predetermined displacement upon application of a current to the ferroelectric layer which induces deformation of the ferroelectric layer thereby causing displacement of the cantilever which is operatively associated with a contact so that an electrical connection is enabled with the contact upon the predetermined displacement of the cantilever. The presence or absence of a connection forms two states of a memory cell.
Public/Granted literature
- US20160315090A1 FERROELECTRIC MECHANICAL MEMORY AND METHOD Public/Granted day:2016-10-27
Information query
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