Invention Grant
- Patent Title: Metal semiconductor field effect transistor with carbon nanotube gate
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Application No.: US15277393Application Date: 2016-09-27
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Publication No.: US09887282B1Publication Date: 2018-02-06
- Inventor: Qing Cao , Ning Li , Jianshi Tang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/49 ; H01L29/66

Abstract:
A method of forming an electrical device that includes forming ohmic contacts to a type III-V semiconductor substrate, and depositing a dielectric layer on the ohmic contacts and an exposed surface of the type III-V semiconductor substrate. A nanotube is positioned on a surface of the high-k dielectric that is overlying the type III-V semiconductor substrate and is between the ohmic contacts using chemical recognition. The dielectric layer is removed so that the nanotube is repositioned directly on the type III-V semiconductor substrate to provide an Schottky contact to a channel region of the type III-V semiconductor substrate.
Information query
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