Invention Grant
- Patent Title: Method for producing differently doped semiconductors
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Application No.: US15307689Application Date: 2015-04-17
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Publication No.: US09887313B2Publication Date: 2018-02-06
- Inventor: Christoph Mader , Christian Guenther , Joachim Erz , Susanne Christine Martens , Jasmin Lehmkuhl , Stephan Traut , Odo Wunnicke
- Applicant: Christoph Mader , Christian Guenther , Joachim Erz , Susanne Christine Martens , Jasmin Lehmkuhl , Stephan Traut , Odo Wunnicke
- Applicant Address: DE Essen
- Assignee: Evonik Degussa GmbH
- Current Assignee: Evonik Degussa GmbH
- Current Assignee Address: DE Essen
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: DE102014208054 20140429
- International Application: PCT/EP2015/058371 WO 20150417
- International Announcement: WO2015/165755 WO 20151105
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; H01L21/22 ; H01L21/228

Abstract:
The present invention relates to a liquid-phase method for doping a semiconductor substrate, characterized in that a first composition containing at least one first dopant is applied to one or more regions of the surface of the semiconductor substrate, in order to create one or more region(s) of the surface of the semiconductor substrate coated with the first composition; a second composition containing at least one second dopant is applied to one or more regions of the surface of the semiconductor substrate, in order to create one or more region(s) of the surface of the semiconductor substrate coated with the second composition, where the one or more region(s) coated with the first composition and the one or more region(s) coated with the second composition are different and do not overlap significantly and where the first dopant is an n-type dopant and the second dopant is a p-type dopant or vice versa; the regions of the surface of the semiconductor substrate coated with the first composition and with the second composition are each fully or partly activated; optionally, the unactivated regions of the surface of the semiconductor substrate coated with the first composition and with the second composition are each oxidized; and the semiconductor substrate is heated to a temperature at which the dopants diffuse out of the coating into the semiconductor substrate. The invention further relates to the semiconductor obtainable by the method and to the use thereof, especially in the production of solar cells.
Public/Granted literature
- US20170054050A1 METHOD FOR PRODUCING DIFFERENTLY DOPED SEMICONDUCTORS Public/Granted day:2017-02-23
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