Invention Grant
- Patent Title: Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus
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Application No.: US14755511Application Date: 2015-06-30
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Publication No.: US09887344B2Publication Date: 2018-02-06
- Inventor: Yasuhiro Itayama , Takayuki Yonemura
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-136247 20140701
- Main IPC: H01L41/187
- IPC: H01L41/187 ; C04B35/468 ; H01L41/08 ; B41J2/14 ; H01L41/09 ; H01L41/113 ; H01L41/318

Abstract:
Provided is a piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, the piezoelectric layer being formed of composite oxide having a perovskite structure which contains at least Pb, Nb, and Ti, in which the piezoelectric layer has a tetragonal crystal structure, the crystal is oriented to {100} against the substrate, and regions are mixed in a crystal lattice, each region including a (100) plane and a (001) plane which are orthogonal to a stacking direction, and the composite oxide of the piezoelectric layer is represented by the following general expression. xPb(Ni1/3,Nb2/3)O3-yPbZrO3-zPbTiO3 (10≦x≦40, 0
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