Invention Grant
- Patent Title: Piezoelectric element, piezoelectric actuator and electronic instrument using the same
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Application No.: US15354319Application Date: 2016-11-17
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Publication No.: US09887347B2Publication Date: 2018-02-06
- Inventor: Makoto Kubota , Takanori Matsuda , Kaoru Miura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2015-231426 20151127
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/187 ; B06B1/06 ; B41J2/14 ; H01L41/047 ; H01L41/08 ; H01L41/09 ; H02N2/18 ; H03H9/64 ; G02B26/02 ; G02B26/08 ; H02N2/10 ; H02N2/16 ; H01L41/316 ; H01L41/318 ; H03H9/02

Abstract:
A piezoelectric element includes a substrate, a first electrode, a piezoelectric film and a second electrode that are sequentially placed in the above-mentioned order. The piezoelectric film contains oxides of Ba, Bi, Ti, Zr, Fe and Mn and has a perovskite structure, wherein the molar ratio y of Bi relative to the sum of Ba and Bi is 0.001≦y≦0.015, the molar ratio x of Zr relative to the sum of Ti, Zr, Fe and Mn is 0.010≦x≦0.060, the molar ratio z of Fe relative to the sum of Ti, Zr, Fe and Mn is 0.001≦z≦0.015, and the molar ratio m of Mn relative to the sum of Ti, Zr, Fe and Mn is 0.0020≦m≦0.0150, while the relationship between y and z is expressed by 0.90≦y/z≦1.10.
Public/Granted literature
- US20170155036A1 PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR AND ELECTRONIC INSTRUMENT USING THE SAME Public/Granted day:2017-06-01
Information query
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