Invention Grant
- Patent Title: Ferroelectric ceramics and manufacturing method thereof
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Application No.: US14620496Application Date: 2015-02-12
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Publication No.: US09887348B2Publication Date: 2018-02-06
- Inventor: Takeshi Kijima , Yuuji Honda , Koichi Furuyama
- Applicant: YOUTEC CO., LTD.
- Applicant Address: JP Chiba
- Assignee: YOUTEC CO., LTD.
- Current Assignee: YOUTEC CO., LTD.
- Current Assignee Address: JP Chiba
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2014-028924 20140218
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/27 ; C23C28/00 ; H01L41/319 ; H01L41/08
Abstract:
To obtain a piezoelectric film having excellent piezoelectric properties. One aspect of the present invention relates to ferroelectric ceramics including a ZrO2 film oriented in (200), a Pt film that is formed on the ZrO2 film and is oriented in (200) and a piezoelectric film formed on the Pt film.
Public/Granted literature
- US20150236244A1 FERROELECTRIC CERAMICS AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-08-20
Information query
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