Invention Grant
- Patent Title: Lithography device with eddy-current brake
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Application No.: US14456541Application Date: 2014-08-11
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Publication No.: US09887613B2Publication Date: 2018-02-06
- Inventor: Alexander Vogler , Markus Hauf
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102012202553 20120220
- Main IPC: H02K49/04
- IPC: H02K49/04 ; G03B27/20 ; G03F7/20 ; H02K49/10

Abstract:
A lithography device includes an eddy-current brake for damping the movement of a structural element of the lithography device. The eddy-current brake includes a plurality of magnets disposed in an arc-shaped arrangement, and a plurality of electrically conductive sheets arranged respectively between adjacent ones of the magnets. A relative movement between the magnets and the electrically conductive sheets in a direction to be damped inducing eddy currents in the electrically conductive sheets.
Public/Granted literature
- US20140346909A1 LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE Public/Granted day:2014-11-27
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