Invention Grant
- Patent Title: Capacitive micro-electro-mechanical system microphone and method for manufacturing the same
-
Application No.: US14811589Application Date: 2015-07-28
-
Publication No.: US09888324B2Publication Date: 2018-02-06
- Inventor: Wei Hu , Gang Li
- Applicant: MEMSensing Microsystems (Suzhou, China) Co., Ltd.
- Applicant Address: CN Suzhou, Jiangsu
- Assignee: Memsensing Microsystems (Suzhou, China) Co., Ltd.
- Current Assignee: Memsensing Microsystems (Suzhou, China) Co., Ltd.
- Current Assignee Address: CN Suzhou, Jiangsu
- Agency: Ladas & Parry, LLP
- Priority: CN201410391494 20140811
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R19/04 ; H04R7/20

Abstract:
The invention relates to a capacitive MEMS microphone and a method for manufacturing the same. The microphone includes: a substrate; a first dielectric supporting layer on the substrate; a movable sensitive layer formed on the first dielectric supporting layer and having a movable diaphragm extending within the air; a backplate disposed over the movable sensitive layer and spaced from the movable diaphragm; a chamber recessed from and extending through the substrate and the first dielectric supporting layer; and an impact resisting device connecting to the movable diaphragm. The impact resisting device is exposed downwardly and disposed above the chamber. The movable sensitive layer has a number of anchors formed around the movable diaphragm, a number of flexible beams each of which is employed to connect one of the anchors to the movable diaphragm, and a bonding portion connecting to the anchor.
Public/Granted literature
- US20160088402A1 CAPACITIVE MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-03-24
Information query