Vacuum pump device and vacuum pump device system
Abstract:
A vacuum pump device comprises: a power supply device including a dew condensation detector configured to detect dew condensation, a regenerative braking resistance, and a controller configured to energize the regenerative braking resistance; a cooling system using coolant; and a pump main body including a motor rotatably driven by the power supply device. When the dew condensation detector detects the dew condensation, the controller energizes the regenerative braking resistance to heat an inside of the power supply device.
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