Pressure sensor having a digital circuit unit connected to adjustment terminals and earth terminals
Abstract:
According to the invention, a pressure receiving space of a pressure sensor is prevented from being charged. In the pressure sensor, a diaphragm is mounted on a base fixed in a cover to form the pressure receiving space in which oil is sealed. A semiconductor pressure detection device is provided in the pressure receiving space, and adjustment lead pins and an earth-terminal lead pin are connected to terminals of the semiconductor pressure detection device by bonding wires. A wiring substrate is provided with the base of the pressure receiving space interposed and faces the base, and a metal foil is provided such that one or more lead pins of the adjustment lead pins and the earth-terminal lead pin are electrically connected in the wiring substrate. Therefore, the charging of the insulative medium sealed in the pressure receiving space is prevented.
Public/Granted literature
Information query
Patent Agency Ranking
0/0