Invention Grant
- Patent Title: Rib-type waveguide silicon modulators and optical devices
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Application No.: US15238688Application Date: 2016-08-16
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Publication No.: US09891451B2Publication Date: 2018-02-13
- Inventor: Tuo Shi , Tzung-I Su , Yongbo Shao , Dong Pan
- Applicant: SiFotonics Technologies Co., Ltd.
- Applicant Address: KY Grand Cayman
- Assignee: SIFOTONICS TECHNOLOGIES CO., LTD.
- Current Assignee: SIFOTONICS TECHNOLOGIES CO., LTD.
- Current Assignee Address: KY Grand Cayman
- Agency: Han IP Corporation
- Agent Andy M. Han
- Main IPC: G02F1/035
- IPC: G02F1/035 ; G02F1/025 ; G02B6/28 ; G02F1/225 ; G02F1/015 ; G02F1/21

Abstract:
A ring optical modulator includes a SOI substrate, including at least first and second top silicon layers, and a silicon-based ring resonator formed on the SOI substrate. The silicon-based ring resonator includes first and second top silicon layers, a thin dielectric gate layer disposed between the top silicon layers, first and second electric contacts, and first rib-type waveguide and ring-shape rib-type waveguide formed on the second top silicon layer. The thin dielectric layer includes a first side in contact with the first top silicon layer and a second side in contact with the second top silicon layer. With electric signals applied on the electric contacts, free carriers accumulate, deplete or invert within the top silicon layers on the first and second sides of the thin dielectric gate layer beneath the ring-shape rib-type waveguide, simultaneously, and a refractive index of the ring-shape rib-type waveguide confining optical fields is modulated.
Public/Granted literature
- US20160357036A1 Rib-Type Waveguide Silicon Modulators And Optical Devices Public/Granted day:2016-12-08
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