Invention Grant
- Patent Title: Polycrystalline silicon thin film transistor device and method of fabricating the same
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Application No.: US15264805Application Date: 2016-09-14
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Publication No.: US09891501B2Publication Date: 2018-02-13
- Inventor: Hsiang-Yun Hsiao , Chia-Kai Chen , Shih-Liang Lin , Ting-Yu Hsu , Pei-Yun Wang , Ya-Qin Huang , Cheng-Wei Jiang
- Applicant: AU OPTRONICS CORPORATION
- Applicant Address: TW Hsin-Chu
- Assignee: AU OPTRONICS CORPORATION
- Current Assignee: AU OPTRONICS CORPORATION
- Current Assignee Address: TW Hsin-Chu
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW104131229A 20150922
- Main IPC: H01L27/14
- IPC: H01L27/14 ; G02F1/361 ; H01L29/786 ; H01L21/02 ; H01L29/66 ; H01L27/12

Abstract:
A method of fabricating a polycrystalline silicon thin film transistor device includes the following steps. A substrate is provided, and a buffer layer having dopants is formed on the substrate. An amorphous silicon layer is formed on the buffer layer having the dopants. A thermal process is performed to convert the amorphous silicon layer into a polycrystalline silicon layer by means of polycrystalization, and to simultaneously out-diffuse a portion of the dopants in the buffer layer into the polycrystalline silicon layer for adjusting a threshold voltage. The polycrystalline silicon layer is patterned to form an active layer. A gate insulating layer is formed on the active layer. A gate electrode is formed on the gate insulating layer. A source doped region and a drain doped region are formed in the active layer.
Public/Granted literature
- US20170084457A1 POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2017-03-23
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