Invention Grant
- Patent Title: Light transmission device and method for semiconductor manufacturing process
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Application No.: US14229026Application Date: 2014-03-28
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Publication No.: US09891529B2Publication Date: 2018-02-13
- Inventor: Yan-Ping Li
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee Address: TW Hsin-Chu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20

Abstract:
A light transmission device is provided. The light transmission device includes a light source, a light transmission module and at least one light regulator. The light transmission module transmits a portion of the light of the light source for implementing a first semiconductor manufacturing process over the wafer. The light source is utilized to implement a second semiconductor manufacturing process over a wafer. The first semiconductor manufacturing process is different from the second semiconductor manufacturing process. The at least one light regulator regulates the light of the light transmission module transmitted to the wafer.
Public/Granted literature
- US20150277231A1 LIGHT TRANSMISSION DEVICE AND METHOD FOR SEMICONDUCTOR MANUFACTURING PROCESS Public/Granted day:2015-10-01
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