Invention Grant
- Patent Title: Maskless lithographic apparatus measuring accumulated amount of light
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Application No.: US15348173Application Date: 2016-11-10
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Publication No.: US09891537B2Publication Date: 2018-02-13
- Inventor: Ji Young Chu , Shiva Ram Krishna , Tae Hyun Kim , Song Woo Bae , Sang Don Jang , Won Don Joo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS, CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS, CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce
- Priority: KR10-2016-0028205 20160309
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
Maskless lithographic apparatus measuring accumulated amount of light is provided. The maskless lithographic apparatus includes a light source which emits light, a stage on which a substrate is disposed, an optical system which converts the light into a beam spot array including a plurality of columns and a plurality of rows and irradiates the beam spot array onto the stage, a slit to which the beam spot array is irradiated and which passes an nth (n is a natural number) row of the beam spot array, an optical sensor which senses the nth row of the beam spot array which has passed through the slit, and a measuring unit which measures an accumulated amount of light in the nth row of the beam spot array sensed by the optical sensor.
Public/Granted literature
- US20170261862A1 MASKLESS LITHOGRAPHIC APPARATUS MEASURING ACCUMULATED AMOUNT OF LIGHT Public/Granted day:2017-09-14
Information query
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