Invention Grant
- Patent Title: Proportional integral derivative control incorporating multiple actuators
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Application No.: US15012284Application Date: 2016-02-01
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Publication No.: US09891599B2Publication Date: 2018-02-13
- Inventor: Jack J. LoPiccolo , Robert J. Mitchell
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G05B11/42 ; B25J9/16

Abstract:
Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler, such as a robotic arm for manipulating an object. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.
Public/Granted literature
- US20170220006A1 PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACTUATORS Public/Granted day:2017-08-03
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