Invention Grant
- Patent Title: Method and system of generating a layout including a fuse layout pattern
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Application No.: US14482194Application Date: 2014-09-10
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Publication No.: US09892221B2Publication Date: 2018-02-13
- Inventor: Shien-Yang Wu , Jye-Yen Cheng , Wei-Chan Kung
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L23/525

Abstract:
A method of generating a layout usable for fabricating an integrated circuit is disclosed. The method includes generating a block layout layer usable in conjunction with a first conductive layout layer. The first conductive layout layer includes a fuse layout pattern, and the block layout layer includes a block layout pattern overlapping a portion of a fuse line portion of the fuse layout pattern. A second conductive layout layer is generated to replace the first conductive layout layer. The generating the second conductive layout layer includes performing an optical proximity correction (OPC) process on the first conductive layout layer except the portion of the fuse line portion of the fuse layout pattern corresponding to the block layout pattern.
Public/Granted literature
- US20150067620A1 METHOD AND SYSTEM OF GENERATING LAYOUT Public/Granted day:2015-03-05
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