- Patent Title: Li-containing phosphoric-acid compound sintered body and sputtering target, and method for manufacturing said Li-containing phosphoric-acid compound sintered body
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Application No.: US14386950Application Date: 2013-04-10
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Publication No.: US09892891B2Publication Date: 2018-02-13
- Inventor: Yuichi Taketomi , Yuki Tao , Moriyoshi Kanamaru
- Applicant: KOBELCO RESEARCH INSTITUTE, INC.
- Applicant Address: JP Kobe-shi
- Assignee: KOBELCO RESEARCH INSTITUTE, INC.
- Current Assignee: KOBELCO RESEARCH INSTITUTE, INC.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-090543 20120411
- International Application: PCT/JP2013/060777 WO 20130410
- International Announcement: WO2013/154118 WO 20131017
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C04B35/447 ; C04B35/645 ; H01M10/052 ; H01M10/0562 ; C01D15/00 ; C04B35/626

Abstract:
Provided is a Li-containing phosphoric-acid compound sintered body of both high relative density and very small crystal grain diameter with reduced incidence of defects (voids) such as air holes, the Li-containing phosphoric-acid compound sintered body causing a Li-containing phosphoric-acid compound thin film useful as a solid electrolyte for a secondary cell or the like to be stabilized without any incidence of target cracking or irregular electrical discharge, and offering high-speed film-forming capability. This Li-containing phosphoric-acid compound sintered body contains no defects measuring 50 μm or larger within a 1 mm2 cross-sectional region in the interior thereof, while having an average crystal grain diameter of no more than 15 μm and a relative density of at least 85%.
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