Invention Grant
- Patent Title: Ceramic member, member for semiconductor manufacturing apparatus, and method for manufacturing ceramic member
-
Application No.: US14246639Application Date: 2014-04-07
-
Publication No.: US09892950B2Publication Date: 2018-02-13
- Inventor: Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda , Atsushi Watanabe
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2011-223851 20111011
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/58 ; C04B35/053

Abstract:
A ceramic member 30 according to the present invention includes a ceramic base 32, which contains a solid solution Mg(Al)O(N) in which Al and N components are dissolved in magnesium oxide as the main phase, and an electrode 34 disposed on a portion of the ceramic base 32 and containing at least one of nitrides, carbides, carbonitrides, and metals as an electrode component. The ceramic base 32 may have an XRD peak of a (111), (200), or (220) plane of Mg(Al)O(N) measured using a CuKα ray at 2θ=36.9 to 39, 42.9 to 44.8, or 62.3 to 65.2 degrees, respectively, between a magnesium oxide cubic crystal peak and an aluminum nitride cubic crystal peak.
Public/Granted literature
Information query
IPC分类: