Invention Grant
- Patent Title: Crack prevent and stop for thin glass substrates
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Application No.: US15392042Application Date: 2016-12-28
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Publication No.: US09892971B1Publication Date: 2018-02-13
- Inventor: Ivan Huang , Elavarasan Pannerselvam , Vijay Sukumaran
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/78 ; H01L23/00 ; H01L21/56 ; H01L21/263 ; H01L21/268 ; H01L21/3065 ; H01L21/02 ; H01L21/027

Abstract:
A method of forming a 3D crack-stop structure in, through, and wrapped around the edges of a substrate to prevent through-substrate cracks from propagating and breaking the substrate and the resulting device are provided. Embodiments include providing a substrate including one or more dies; forming a continuous first trench near an outer edge of the substrate; forming a continuous second trench parallel to and on an opposite side of the first trench from the outer edge; forming a continuous row of vias parallel to and on an opposite side of the second trench from the first trench, forming a continuous third trench parallel to and near an outer edge of each of the dies; forming a protective layer wrapping around the outer edge of the substrate and over and filling the trenches and vias; and patterning active areas of the substrate between the vias and the third trench.
Information query
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