Invention Grant
- Patent Title: Bipolar transistor device fabrication methods
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Application No.: US14844608Application Date: 2015-09-03
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Publication No.: US09893164B2Publication Date: 2018-02-13
- Inventor: Xin Lin , Daniel J Blomberg , Jiang-Kai Zuo
- Applicant: Xin Lin , Daniel J Blomberg , Jiang-Kai Zuo
- Applicant Address: US TX Austin
- Assignee: NXP USA, INC.
- Current Assignee: NXP USA, INC.
- Current Assignee Address: US TX Austin
- Agent Rajeev Madnawat
- Main IPC: H02H9/04
- IPC: H02H9/04 ; H01L21/331 ; H01L29/73 ; H01L27/02 ; H01L29/66 ; H01L29/735 ; H01L21/265 ; H01L21/266 ; H01L21/762 ; H01L29/06 ; H01L29/10 ; H01L29/08

Abstract:
A method of fabricating a bipolar transistor device includes performing a first plurality of implantation procedures to implant dopant of a first conductivity type to form emitter and collector regions laterally spaced from one another in a semiconductor substrate, and performing a second plurality of implantation procedures to implant dopant of a second conductivity type in the semiconductor substrate to form a composite base region. The composite base region includes a base contact region, a buried region through which a buried conduction path between the emitter and collector regions is formed during operation, and a base link region electrically connecting the base contact region and the buried region. The base link region has a dopant concentration level higher than the buried region and is disposed laterally between the emitter and collector regions.
Public/Granted literature
- US20150380513A1 BIPOLAR TRANSISTOR DEVICE FABRICATION METHODS Public/Granted day:2015-12-31
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