- Patent Title: Method for manufacturing a photovoltaic cell with selective doping
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Application No.: US15124097Application Date: 2015-03-05
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Publication No.: US09893229B2Publication Date: 2018-02-13
- Inventor: Jérôme Le Perchec , Rémi Monna
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUIE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUIE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1451869 20140307
- International Application: PCT/FR2015/050540 WO 20150305
- International Announcement: WO2015/132532 WO 20150911
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0224 ; H01L31/068 ; H01L31/0216

Abstract:
A method for creating a photovoltaic cell, includes forming a first doped region in a semiconductor substrate having a first concentration of doping elements; forming, by ion implantation, alignment units, the largest size of which is smaller than one millimeter, and a second doped region, adjacent to the first region with a second concentration of doping elements; heat-treating the substrate to activate the doping elements and to form an oxide layer at the surface of the substrate, the second concentration and the heat treatment conditions being selected such that the oxide layer has a thickness above the alignment units that is larger, by at least 10 nm, than the thickness of the oxide layer above an area of the substrate adjacent to the alignment units; depositing an antireflection layer onto the oxide layer; and depositing an electrode onto the antireflection coating, through a screen, opposite the second region.
Public/Granted literature
- US20170018677A1 METHOD FOR MANUFACTURING A PHOTOVOLTAIC CELL WITH SELECTIVE DOPING Public/Granted day:2017-01-19
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