Invention Grant
- Patent Title: Method for forming a suspended lithium-based membrane semiconductor structure
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Application No.: US14407762Application Date: 2013-06-14
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Publication No.: US09893264B2Publication Date: 2018-02-13
- Inventor: Songbin Gong , Gianluca Piazza
- Applicant: CARNEGIE MELLON UNIVERSITY , UNIVERSITY OF PENNSYLVANIA
- Applicant Address: US PA Pittsburgh US PA Philadelphia
- Assignee: Carnegie Mellon University,University of Pennsylvania
- Current Assignee: Carnegie Mellon University,University of Pennsylvania
- Current Assignee Address: US PA Pittsburgh US PA Philadelphia
- Agency: Fish & Richardson P.C.
- International Application: PCT/US2013/045877 WO 20130614
- International Announcement: WO2014/035530 WO 20140306
- Main IPC: H04R31/00
- IPC: H04R31/00 ; H01L41/047 ; H01L41/187 ; H01L41/313 ; H01L41/332 ; H03H3/02 ; H03H9/02 ; H03H9/13
Abstract:
In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.
Public/Granted literature
- US20150162520A1 MICROELECTRONIC STRUCTURES WITH SUSPENDED LITHIUM-BASED THIN FILMS Public/Granted day:2015-06-11
Information query
