Invention Grant
- Patent Title: Magnetic memory device comprising oxide patterns
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Application No.: US14703842Application Date: 2015-05-04
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Publication No.: US09893272B2Publication Date: 2018-02-13
- Inventor: Shin-Jae Kang , Jongchul Park , Byoungjae Bae , Jaesuk Kwon , Hyunsoo Shin
- Applicant: Shin-Jae Kang , Jongchul Park , Byoungjae Bae , Jaesuk Kwon , Hyunsoo Shin
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2014-0097535 20140730
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; H01L43/08 ; H01L43/12

Abstract:
A method of fabricating a magnetic memory device is provided. The method may include sequentially forming a first magnetic layer, a tunnel barrier layer, and a second magnetic layer on a substrate, forming a mask pattern on the second magnetic layer to expose a portion of the second magnetic layer, forming a capping insulating layer on a sidewall of the mask pattern and the portion of the second magnetic layer, injecting an oxygen ion into the portion of the second magnetic layer through the capping insulating layer to form an oxide layer, anisotropically etching the capping insulating layer to form a capping spacer, and patterning the oxide layer, the tunnel barrier layer, and the first magnetic layer using the mask pattern and the capping spacer.
Public/Granted literature
- US20160035969A1 MAGNETIC MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-02-04
Information query
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