Invention Grant
- Patent Title: Sheet for semiconductor-related-member processing and method of manufacturing chips using the sheet
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Application No.: US15122195Application Date: 2015-03-02
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Publication No.: US09905451B2Publication Date: 2018-02-27
- Inventor: Yosuke Koma , Takuo Nishida , Misaki Sakamoto
- Applicant: LINTEC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: LINTEC CORPORATION
- Current Assignee: LINTEC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2014-041020 20140303
- International Application: PCT/JP2015/056042 WO 20150302
- International Announcement: WO2015/133420 WO 20150911
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/78 ; H01L21/68 ; H01L23/02 ; H01L21/683 ; C09J133/06 ; C09J7/02 ; C09J4/00 ; C09J201/02 ; C09J5/00 ; C09J5/06 ; H01L21/324 ; C08F220/06 ; C09J4/06

Abstract:
As a semiconductor-related-member processing sheet which can stably achieve to enhance the removability of the semiconductor-related-member processing sheet and to suppress the reliability degradation of members comprising chips manufactured from a semiconductor-related member using the semiconductor-related-member processing sheet, there is provided a semiconductor-related-member processing sheet, comprising a base material and a pressure sensitive adhesive layer provided on or above one surface of the base material, wherein the pressure sensitive adhesive layer comprises one or more types of energy ray polymerizable compounds having an energy ray polymerizable functional group, wherein at least one type of the energy ray polymerizable compounds is a polymerizable branched polymer that is a polymer having a branched structure, wherein a contact angle on a measurement target surface is 40° or less when measured using a water droplet under an environment of 25° C. and a relative humidity of 50%.
Public/Granted literature
- US20160372358A1 SHEET FOR SEMICONDUCTOR-RELATED-MEMBER PROCESSING AND METHOD OF MANUFACTURING CHIPS USING THE SHEET Public/Granted day:2016-12-22
Information query
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