- Patent Title: Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine
-
Application No.: US15309508Application Date: 2015-05-11
-
Publication No.: US09908212B2Publication Date: 2018-03-06
- Inventor: Shuichi Suemasa , Hiroyuki Shinozaki , Yutaka Kobayashi
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2014-100384 20140514; JP2015-048837 20150311
- International Application: PCT/JP2015/063500 WO 20150511
- International Announcement: WO2015/174375 WO 20151119
- Main IPC: B24B37/34
- IPC: B24B37/34 ; B24B37/20 ; H01L21/304

Abstract:
An apparatus for replacing a polishing table, which is used in a polishing apparatus for polishing a substrate such as wafer, is disclosed. The polishing table replacement apparatus (10) is used for removing a polishing table (3) from a polishing apparatus (1). This polishing table replacement apparatus (10) includes a crane (10) configured to move the polishing table (3) vertically and horizontally, a table stage (14) on which the polishing table (3) can be placed, and a table-stage tilting mechanism (15) configured to tilt the table stage (14).
Public/Granted literature
Information query