Invention Grant
- Patent Title: Method of CMP pad conditioning
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Application No.: US14875410Application Date: 2015-10-05
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Publication No.: US09908213B2Publication Date: 2018-03-06
- Inventor: Hsiu-Ming Yeh , Feng-Inn Wu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B53/053 ; B24B53/00 ; B24B53/02 ; B24B53/12 ; H01L21/306

Abstract:
A method of using a chemical mechanical polishing (CMP)apparatus that includes a apparatus is provided. The method includes providing a conditioning disc for conditioning the polishing pad, where the conditioning disc includes a plurality of portions of subsystem discs. The portions may be regions of the disc that are concentric. Each portion of the disc is operable to rotate at a different angular velocity. In some embodiments, a different applied loading is provided to each of the portions of the disc in addition to or in lieu of the different angular velocities.
Public/Granted literature
- US20160023324A1 METHOD OF AND APPARATUS FOR CMP PAD CONDITIONING Public/Granted day:2016-01-28
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