Invention Grant
- Patent Title: Vapor deposition apparatus, vapor deposition method using vapor deposition apparatus, and device production method
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Application No.: US15124145Application Date: 2015-02-24
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Publication No.: US09909205B2Publication Date: 2018-03-06
- Inventor: Akira Takiguchi
- Applicant: JOLED INC.
- Applicant Address: JP Tokyo
- Assignee: JOLED INC.
- Current Assignee: JOLED INC.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2014-048025 20140311
- International Application: PCT/JP2015/000902 WO 20150224
- International Announcement: WO2015/136859 WO 20150917
- Main IPC: H01L29/18
- IPC: H01L29/18 ; H01L51/05 ; H01L29/08 ; C23C14/24 ; H05B33/10 ; C23C14/56 ; C23C14/54 ; H01L51/56 ; H01L51/00

Abstract:
A vapor deposition apparatus including: a chamber that holds an object on which a film is to be deposited through vapor deposition; a vapor deposition source that is disposed inside the chamber, the vapor deposition source having a housing that accommodates therein a vapor deposition material for the vapor deposition; and a heater that heats the vapor deposition material. The housing has a plurality of eject outlets and an air outlet that is openable and closable, the plurality of eject outlets connecting the inside of the housing with the outside of the housing and ejecting vapor of the vapor deposition material towards the object.
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