Invention Grant
- Patent Title: Method for determining errors in a rotation position determination system
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Application No.: US14760126Application Date: 2013-01-09
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Publication No.: US09909865B2Publication Date: 2018-03-06
- Inventor: Rainer Sagemueller , Tobias Held , Dominik Seitz
- Applicant: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- International Application: PCT/EP2013/050328 WO 20130109
- International Announcement: WO2014/108187 WO 20140717
- Main IPC: G01B21/04
- IPC: G01B21/04

Abstract:
A method for determining one or more errors of a rotational position establishment system is provided. More particularly, a rotary apparatus having first and second parts that rotate relative to one another about a rotation axis of the rotary apparatus is used to determine one or more rotation errors. A rotation position determination system is used to determine rotation position errors from the rotation positions of the rotary apparatus or a change in the rotation position of the rotary apparatus, and from rotation positions of a reference rotary apparatus or a change in the rotation position of the reference rotary apparatus.
Public/Granted literature
- US20150345940A1 METHOD FOR DETERMINING ERRORS IN A ROTATION POSITION DETERMINATION SYSTEM Public/Granted day:2015-12-03
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