Invention Grant
- Patent Title: MEMS gyroscope for determining rotational movements about an x, y, and/or z axis
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Application No.: US14444800Application Date: 2014-07-28
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Publication No.: US09909873B2Publication Date: 2018-03-06
- Inventor: Alessandro Rocchi
- Applicant: Hanking Electronics, Ltd.
- Applicant Address: US OH Solon
- Assignee: Hanking Electronics, Ltd.
- Current Assignee: Hanking Electronics, Ltd.
- Current Assignee Address: US OH Solon
- Agency: Hartman Global IP Law
- Agent Gary M. Hartman; Domenica N. S. Hartman
- Priority: DE102009001248 20090227
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5712 ; G01C19/574

Abstract:
The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially with respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses (2) are connected to at least one further non-oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect deflections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).
Public/Granted literature
- US20160025492A1 MEMS Gyroscope for Determining Rotational Movements about an X, Y, and/or Z Axis Public/Granted day:2016-01-28
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