Invention Grant
- Patent Title: Rotation rate sensor
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Application No.: US14783792Application Date: 2014-04-07
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Publication No.: US09909874B2Publication Date: 2018-03-06
- Inventor: Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013206414 20130411
- International Application: PCT/EP2014/056892 WO 20140407
- International Announcement: WO2014/166851 WO 20141016
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5712 ; G01C19/5719 ; G01C19/574

Abstract:
A micromechanical rotation rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; a second Coriolis element; a drive device for deflecting the first and second Coriolis elements from a neutral position; and a detection device. The first Coriolis element, with regard to a first axis extending in parallel to the main plane of extension, has a mass-symmetrical design with respect to the second Coriolis element. The first and second Coriolis elements have a common main plane of extension, and in the neutral position the shared main plane of extension extends in parallel to the main plane of extension of the substrate. The first and second Coriolis elements each have a mass-symmetrical design with respect to a second axis extending perpendicularly with respect to the first axis. The first and second Coriolis elements are drivable by the drive device.
Public/Granted literature
- US20160047654A1 ROTATION RATE SENSOR Public/Granted day:2016-02-18
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