Invention Grant
- Patent Title: Projection exposure apparatus including at least one mirror
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Application No.: US15298323Application Date: 2016-10-20
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Publication No.: US09910364B2Publication Date: 2018-03-06
- Inventor: Boris Bittner , Norbert Wabra , Sonja Schneider , Ricarda Schoemer , Stefan Rist
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102015220537 20151021
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A microlithographic projection exposure apparatus includes: a projection lens for imaging mask structures via an exposure radiation including at least one optical element and at least one manipulator; a read-in device for reading in application-specific structure information defining at least one property of an angular distribution of the exposure radiation upon entering the projection lens; and a travel establishing device for establishing a travel command defining a change to be made in an optical effect of the at least one optical element by manipulation of a property of the optical element via the at least one manipulator along a travel. The travel establishing device is configured to establish the travel command in an at least two-stage optimization.
Public/Granted literature
- US20170115576A1 PROJECTION EXPOSURE APPARATUS INCLUDING AT LEAST ONE MIRROR Public/Granted day:2017-04-27
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