Invention Grant
- Patent Title: K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data
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Application No.: US13974915Application Date: 2013-08-23
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Publication No.: US09910430B2Publication Date: 2018-03-06
- Inventor: Dermot Cantwell , Thorsten Kril , Aleksey Yanovich
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G05B23/02
- IPC: G05B23/02
Abstract:
A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowable ranges based on the target baseline. The server computer system determines whether sample data that is associated with a second tool running the recipe is performing within the parameters based on a comparison of the sample data to the reference fingerprint. The second tool can be the first tool or another tool of a same type as the first tool. The server computer system provides a classification of the second tool to at least one of a system or a user based on the comparison of the sample data to the reference fingerprint. The classification indicates whether the second tool is performing within the parameters.
Public/Granted literature
- US20150057788A1 K-NEAREST NEIGHBOR-BASED METHOD AND SYSTEM TO PROVIDE MULTI-VARIATE ANALYSIS ON TOOL PROCESS DATA Public/Granted day:2015-02-26
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