Invention Grant
- Patent Title: Composite substrate, elastic wave device, and method for producing elastic wave device
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Application No.: US14811953Application Date: 2015-07-29
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Publication No.: US09911639B2Publication Date: 2018-03-06
- Inventor: Ryosuke Hattori , Yuji Hori , Tomoyoshi Tai
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Aichi
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Aichi
- Agency: Cermak Nakajima & McGowan LLP
- Agent Tomoko Nakajima
- Priority: JP2013-030161 20130219
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/683 ; B32B38/10 ; B32B9/00 ; B32B9/04 ; B32B7/02 ; H03H9/25 ; H03H3/10 ; B32B7/06 ; B32B18/00 ; H01L21/78 ; B32B7/12 ; B32B27/08 ; B32B27/20 ; B32B27/28 ; H01L41/187 ; H03H9/02 ; B32B37/10 ; H03H3/08
Abstract:
A composite substrate 10 is formed by bonding together a piezoelectric substrate 12 and a support substrate 14 that has a lower thermal expansion coefficient than the piezoelectric substrate. The support substrate 14 is formed by directly bonding together a first substrate 14a and a second substrate 14b at a strength that allows separation with a blade, the first and second substrates being formed of the same material, and a surface of the first substrate 14a is bonded to the piezoelectric substrate 12, the surface being opposite to another surface of the first substrate 14a bonded to the second substrate 14b.
Public/Granted literature
- US20150328875A1 Composite Substrate, Elastic Wave Device, and Method for Producing Elastic Wave Device Public/Granted day:2015-11-19
Information query
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