Invention Grant
- Patent Title: SBFET transistor and corresponding fabrication process
-
Application No.: US15372930Application Date: 2016-12-08
-
Publication No.: US09911827B2Publication Date: 2018-03-06
- Inventor: Louis Hutin , Julien Borrel , Yves Morand , Fabrice Nemouchi
- Applicant: Commissariat a l'energie atomique et aux energies alternatives , STMicroelectronics SA , STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Paris FR Montrouge FR Crolles
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives,ST Microelectronics SA,ST Microelectronics (Crolles 2) SAS
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives,ST Microelectronics SA,ST Microelectronics (Crolles 2) SAS
- Current Assignee Address: FR Paris FR Montrouge FR Crolles
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1561963 20151208
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/08

Abstract:
A process for manufacturing a Schottky barrier field-effect transistor is provided. The process includes: providing a structure including a control gate and a semiconductive layer positioned under the gate and having protrusions that protrude laterally with respect to the gate; anisotropically etching at least one of the protrusions by using the control gate as a mask, so as to form a recess in this protrusion, this recess defining a lateral face of the semiconductive layer; depositing a layer of insulator on the lateral face of the semiconductive layer; and depositing a metal in the recess on the layer of insulator so as to form a contact of metal/insulator/semiconductor type between the deposit of metal and the lateral face of the semiconductive layer.
Public/Granted literature
- US20170162672A1 SBFET TRANSISTOR AND CORRESPONDING FABRICATION PROCESS Public/Granted day:2017-06-08
Information query
IPC分类: