Invention Grant
- Patent Title: Thin film transistor and manufacturing method of thin film transistor
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Application No.: US15427442Application Date: 2017-02-08
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Publication No.: US09911863B2Publication Date: 2018-03-06
- Inventor: Noriyoshi Kanda
- Applicant: Japan Display Inc.
- Applicant Address: JP Minato-ku
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-022043 20160208
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L21/441 ; H01L21/4763 ; H01L29/24 ; H01L29/45 ; H01L29/49 ; H01L29/66

Abstract:
According to one embodiment, a manufacturing method of thin film transistor includes forming an oxide semiconductor layer on a first insulating film, forming a first conductive layer formed of molybdenum or a molybdenum alloy on the oxide semiconductor layer, forming a second conductive layer on the first conductive layer, forming a resist mask on the second conductive layer, and forming a first conductive portion and a second conductive portion by performing dry etching of the second conductive layer using the resist mask.
Public/Granted literature
- US20170229582A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR Public/Granted day:2017-08-10
Information query
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