Invention Grant
- Patent Title: Electronic device using MEMS technology
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Application No.: US15250519Application Date: 2016-08-29
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Publication No.: US09914637B2Publication Date: 2018-03-13
- Inventor: Akira Fujimoto , Naofumi Nakamura , Tamio Ikehashi
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JP2016-051228 20160315
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00

Abstract:
According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a cavity on an inner side of the protective film. The protective film includes a first protective layer and a second protective layer located on the first protective layer. A hole extends in a direction parallel to a main surface of the base region, and the second protective layer covers the hole.
Public/Granted literature
- US20170267517A1 ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE Public/Granted day:2017-09-21
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